MIT OpenCourseWare

6.152J / 3.155J Micro/Nano Processing Technology, Fall 2005

A device pad structure, shown with a penny for scale.
A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the National Science Foundation Image Library.)

課程重點

This course features detailed lecture slides in the lecture notes section, along with other lab materials used by students in the course in the labs section. In addition, problem sets with solutions are also provided in the assignments section.

課程描述

This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.

師資

講師:
Prof. Martin Schmidt
Dr. Robert O'Handley
Susan Ruff

上課時數

教師授課:
每週2節
每節1.5小時

實習課程:
每週1節 (9 weeks)
每節4小時

程度

大學部

回應

告訴我們您對本課程或「開放式課程網頁」的建議。

聲明

麻省理工學院開放式課程認可 開放式課程計畫(OOPS)的翻譯計畫,開放式課程計畫(OOPS)乃是運用其獨立團隊、獨立資源、獨立流程進行翻譯計畫之團隊。

所有麻省理工學院開放式課程之材料皆以麻省理工學院開放式課程創作共享授權發佈,所有之翻譯資料皆由開放式課程計畫(OOPS)所提供,並由其負翻譯品質之責任。

此處麻省理工學院開放式課程之資料乃由 開放式課程計畫(OOPS) 譯為正體中文。麻省理工學院開放式課程在此聲明,不論是否遭遇或發現相關議題,麻省理工學院開放式課程、麻省理工學院教師、麻省理工學院校方並不對翻譯正確度及完整性作保證。上述單位並對翻譯後之資料不作明示或默章鴷穭@特定目的之適合性之保證、非侵權之保證、或永不出錯之保證。麻省理工學院校方、麻省理工學院開放式課程對翻譯上之不正確不負任何責任。由翻譯所引發任何關於此等資料之不正確或其他瑕疵,皆由開放式課程計畫(OOPS)負全責,而非麻省理工學院開放式課程之責。

原文聲明