MIT OpenCourseWare


» 進階搜尋
 課程首頁
 教學大綱
 教學時程
 相關閱讀資料
 課堂講稿
 實作課程
 作業
 測驗

教學大綱


本頁翻譯進度

燈號說明

審定:無
翻譯:郭玉林(簡介並寄信)、程正喜(簡介並寄信)、呂尊實(簡介並寄信)、張燕均(簡介並寄信)
編輯:陳玉侖(簡介並寄信)


講師

Martin Schmidt教授
Robert O'Handley博士


實驗講師

Li-Wen C Wang


寫作講師

Susan Ruff


課程概述

本課程對微米/奈米製程理論和技術進行介紹。因為本課程跨越不同的領域,所以它的內容包括了工程學(電學、材料學、機械學、化學)和理科等很多個學科。在課堂上我們將討論基本製程技術的理論,比如擴散、氧化、光刻、化學氣相沉積等、物理氣相沉積、蝕刻和金屬化。

在本課程的實驗部分,我們將製作三種不同的元件:金屬氧化物半導體(MOS)電容器、微懸臂梁和微射流元件。你可以在實驗室奡試每個元件,並準備每一個元件的實驗報告。

在本課程的最後,每個人都應該熟悉理解用於微米/奈米製造的各種製程技術。每個人都應該明白各個製程理論、製造過程和特色,以及結合製造元件時過程之間的相互關係。


必備先修

講師的允許


課程安排

本課程每星期將會有兩次課,時間從1小時到1小時30分鐘。實驗課從學期第二周開始,直到課程結束。同學們需要參加九個星期的實驗課,每週實驗課的時間是4個小時。


家庭作業

本學期大概有6次家庭作業集。作業集一般都在規定後一個星期提交。我們強烈鼓勵同學們以小組為單位做作業,每組提交一個答案集。你要儘快找一個不多於四個成員的家庭作業小組。所有小組成員都必須在完成的答案上簽名,在答案開頭要注明負責完稿同學的姓名。你的簽名表明你為答案出過一分力。


測驗

我們將會有兩次測驗,時間為1小時到1小時30分鐘。預定在第13堂課和第23堂課結束的次日進行。還有一次課後測驗,在第18課的那個星期上交。


實驗報告

實驗報告(3)在實驗單元結束後的一個星期提交。第二個實驗報告的寫作將會被評分,作為溝通密集科目(CI-M)學分的一部分。這個實驗報告將在學期結束時繳交作為專業寫作的評分。我們將會在實驗時分發講義,更詳細地描述實驗報告要求。


成績

實驗分數和課程內容的成績比重相同,細目分類列在下表中。.

活動 百分比
家庭作業 10%
測驗1 15%
測驗2 15%
課後測驗 15%
積體電路(IC)實驗報告-技術性的 10%
微機電系統(MEMS)實驗報告 10%
微機電系統(MEMS)實驗報告-寫作 5%
流體實驗報告 10%
實驗表現 10%


學術管理規定

課程中要求的家庭作業、測驗以及期末報告,其主要目的是幫助你學習這門功課。他們的第二個目的是幫助老師評估你對這門課程的理解,特別是評定課程期最後的成績。因為這樣,你和同組同學為準備這些材料所作的努力必須被同學和老師理解和認同。接下來是我們對允許合作限度的規定。這樣做的目的是提供指導,但是希望你能明白,違反規定將受到老師最嚴厲的懲罰。

家庭作業就是一種學習工具。因此,我們贊成同學們合作完成作業,前提是每個合作者都為問題的答案付出同樣的努力。

對老師來說,在評定你的表現時,課堂測驗和課後測驗是同樣重要的。進行這些測驗時不允許相互協作。課後測驗必須是你獨立完成,你只能和老師討論本課程的內容。

實驗報告的目的是為了把課程中的內容聯繫在一起。你會和小組成員一起製作元件和收集資料。但是,實驗報告上資料的分析、結果和結論都必須由你獨立完成。使用以前學期的實驗報告是絕對禁止的。老師可以在實驗報告的準備方面給你一些幫助。


實驗小組

實驗小組由不多於六個成員組成,每個成員都必須參加本學期的9次實驗課。可能的實驗時間列在下面。實驗小組要每週做一次實驗,每次4小時。


實驗守則

  1. 1. 出席

    實驗課要準時出席。如果生病或者因為某些原因不能來參加,在實驗課開始之前要與助教聯繫。

  2. 2. 簽到和簽退-MTL身份識別卡

    每次實驗課,必須從助教那堮釣鴗@張MTL身份識別卡,當進入實驗室的時候都需要這張身份識別卡。在實驗課程完成後,簽退並把這張卡還給助教。

  3. 3. 外套 / 背包 / 存儲櫃

    把你的外套和任何私人物品存儲在帶鎖的存儲櫃堙C不要把任何貴重物品放在存儲櫃堶情I

  4. 4. 攜帶物品

    ICL/TRL分別是10級和100級的無塵室。你不能帶任何東西到堶情]包括筆、紙、筆記本等)。房間埵閉做L塵室特製的筆和紙。

  5. 5. 穿著

    穿著短褲、裙子和(或者)赤腳(露出大腿或皮膚)在實驗室堻ㄛO不允許的。如果你穿了一雙雪靴,請帶一雙鞋來替換。你必須保護好你自己和實驗室。

Instructors

Prof. Martin Schmidt
Dr. Robert O’Handley


Laboratory Instructor

Li-Wen C Wang


Writing Instructor

Susan Ruff


Course Overview

This course introduces the theory and technology of micro/nano fabrication. Because of the interdisciplinary nature of the subject, its content includes concepts from many disciplines in engineering (electrical, materials, mechanical, chemical) and science. In lecture we will discuss the theory of basic processing techniques, such as diffusion, oxidation, photolithography, chemical vapor deposition, physical vapor deposition, etching, and metallization.

In the laboratory section of this course, we will be fabricating three different devices; an MOS capacitor, a microcantilever, and a microfluidic device. You will test each device in the lab, and prepare a laboratory report for each device.

At the end of this course one should have a good understanding of the various processing techniques used to micro/nano fabricate. One should understand the theory of the individual, processes, how they are characterized, and the interrelationship of these processes when combined to fabricate devices.


Prerequisites

Permission of instructor.


Organization

This course will meet for two 1-1/2-hour lectures per week. Laboratory sessions will begin on the second week of the term and continue until the end of the semester. Students will attend one four-hour laboratory session per week for 9 weeks.


Homework

There will be approximately 6 homework sets during the semester. The homework sets will be due approximately one week after being issued. We strongly encourage students to work in teams with one set of solutions submitted by each team. As soon as possible, you should set up a homework team consisting of no more than four members. All team members must sign the completed solution and the final draft authors should be clearly identified at the beginning of the solution. Your signature is your bond that you have contributed significantly to the solutions.


Exams

There will be two 1-1/2 hour quizzes, scheduled for Lecture 13, and one day after Lecture 23, and one take-home quiz, due in the week of Lecture 18.


Lab Reports

The lab reports (3) are due one week after the conclusion of the lab module. The second laboratory report will be graded for writing as part of the CI-M credit. This lab report will be resubmitted for a technical writing grade towards the end of the term. We will distribute hand-outs that will describe in more detail the lab report requirements at the time of the labs.


Grades

The grades weight laboratory and lecture content equally. The breakdown is listed below.

ACTIVITY PERCENTAGE
Homework 10%
Quiz#1 15%
Quiz#2 15%
Take-Home Quiz 15%
IC Lab Report-Technical 10%
MEMS Lab Report 10%
MEMS Lab Report-Writing 5%
Fluids Lab Report 10%
Lab Performance 10%


Policy For Academic Conduct

The homework, quizzes, and final report, which are required in this course, have the primary function of helping you learn the material. The secondary function of these assignments is to aid the staff in assessing your understanding of the material, in particular when the time comes to provide a final grade for the course. To this end, the extent to which you collaborate with your colleagues in preparing this material must be understood and agreed upon by both the students and the staff. The following is our policy regarding permissible levels of collaboration. This is intended to provide guidance, but please recognize that a violation of this policy will be dealt with in the most severe manner available to the staff.

The homework assignments are intended nearly exclusively to serve as a learning tool. As such, we are comfortable with collaboration amongst students on the solving of these assignments provided all collaborators are equal contributors to the solution of the problems.

The in-class quizzes and the take home quiz are important to the staff in assessing your performance. Collaboration in taking these exams is not permitted. The take home exam must be exclusively your own work, and you can only discuss it with the staff for this course.

The lab reports are intended to pull-together the material from the lectures. You will work in groups to fabricate devices and collect data. However, the data analysis, results and conclusions presented in the report must be exclusively your own. The use of reports written in previous terms is strictly forbidden. The staff will be available to assist you in the preparation of these reports.


Laboratory Groups

Laboratory groups with consist of six or fewer students who will meet for 9 lab sessions during the semester. The possible times available are listed below. The groups will meet for a 4 hour time slot, once each week.


Laboratory Rules

  1. Attendance

    Show up on time for your Lab sessions. If you are sick or for some reason you have to miss your Lab session, contact your Teaching Assistant prior to the start of the Lab Session.

  2. Signing in and out - MTL Identification Card

    For each Lab session, you MUST obtain a MTL Identification Card from a TA. ID cards are required for entering the lab. When you finish your Lab Session, sign-out of the lab and please return your ID Card.

  3. Coats / Backpacks / Storage

    Store your coats and any personal belongings in the lockers.
    Do not leave any valuable item(s) in lockers!

  4. What to bring?

    ICL/TRL, are CLASS 10 and CLASS 100 clean-rooms respectively. You should not bring anything into these clean-rooms (including pens, paper, notebooks etc.). Special clean-room pens and paper are available inside the room.

  5. What to wear?

    No shorts, skirts, and / or barefeet (exposed legs or skin) are allowed in the Lab. Bring an extra pair of shoes for changing if you wear snow boots. You must protect yourself and the laboratory.

 
MIT Home
Massachusetts Institute of Technology Terms of Use Privacy